Profilometry

This unit has a series of instruments that allow us to inspect and study the surface topography of any solid object of interest. Among the most relevant information that we can extract are the quantitative parameters that define roughness, as well as providing metrological information of the samples and obtaining 3D images with nanometric precision.

The unit has various instrumental techniques:

3D Optical Interferometric Profilometry:

• The interferometric microscope allows the characterization and quantification of surface roughness, measurement of heights, critical dimensions and other topographical characteristics.
• The equipment allows the application of two different types of techniques depending on the characteristics of the samples. The VSI technique is applied to the roughest samples, while the PSI technique is applied to samples with very low roughness, flat, polished and with a mirror-like surface finish.
• All measurements are non-destructive, rapid and do not require any type of sample preparation.

2 3D Stylus profilometry:

• The profilometer consists of a measuring head which has a movable tip (diamond) that comes into contact with the sample. The motorized sample holder moves slowly so that the tip travels over the surface of interest applying a constant force on it.
• The vertical movement of the tip is measured electrically and converted to a digital format. Any sample with a reasonably “hard” surface can be measured over a range of vertical displacement that at best achieves a resolution of 1 Å.
• It is possible to measure the thickness of thin layers, the height of craters, and any other feature or topographic detail of interest on the surface. In addition to determining and calculating the parameters that define roughness.

3D Optical Focus Variation Profilometry:

• It allows roughness measurements by providing high-contrast color images with deep focus. The robust frame and intelligent illumination technology provide fast, high-resolution measurement, making it a particularly attractive measurement system due to its efficiency, speed and wide range of applications. Measurements are achieved in a matter of seconds, and features such as a coaxial laser for easy focusing enhance its usability.